COURSE SYLLABUS
INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
1
Course Title:
INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
2
Course Code:
EEM4503
3
Type of Course:
Optional
4
Level of Course:
First Cycle
5
Year of Study:
4
6
Semester:
7
7
ECTS Credits Allocated:
4
8
Theoretical (hour/week):
3
9
Practice (hour/week) :
0
10
Laboratory (hour/week) :
0
11
Prerequisites:
None
12
Recommended optional programme components:
None
13
Language:
Turkish
14
Mode of Delivery:
Face to face
15
Course Coordinator:
Dr. Ögr. Üyesi ESİN KARPAT
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Course Lecturers:
Yrd. Doç. Dr. Esin KARPAT
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Contactinformation of the Course Coordinator:
esinoz@uludag.edu.tr
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Website:
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Objective of the Course:
The aim of the lectures is to give an overview of the Microelectromechanic systems world and the MEMS devices. It has been structured so to introduce the main features and properties of Microelectromechanical systems and their current and potential advantages which mainly derive from miniaturization and the evolution of the standard IC technological approach.
20
Contribution of the Course to Professional Development
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Learning Outcomes:
1
To be able to gain an interdisciplinary overview of the current state of MEMS;
2
To be able to learn microfabrication methods;
3
To be able to learn different applications of MEMS;
Week
Theoretical
Practical
1
Introduction to MEMS.
2
History of Micro electromechanical systems
3
Applications of MEMS
4
Materials
5
Design Principles (Scaling)
6
Mems products
7
Microfabrication - Bulk
8
Microfabrication-Micro surface
9
Repeating courses
10
MEMS devices (Digital micromirrors, accelerometers, etc)
11
Microsensors (chemical, biological, mechanical, etc)
12
MEMS Actuators.
13
Future of MEMS
14
Future of MEMS
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Textbooks, References and/or Other Materials:
An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf,Artech House Incorporated, 1999
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Assesment
TERM LEARNING ACTIVITIES
NUMBER
PERCENT
Midterm Exam
1
20
Quiz
0
0
Homeworks, Performances
1
20
Final Exam
1
60
Total
3
100
Contribution of Term (Year) Learning Activities to Success Grade
40
Contribution of Final Exam to Success Grade
60
Total
100
Measurement and Evaluation Techniques Used in the Course
Information
25
ECTS / WORK LOAD TABLE
Activites
NUMBER
TIME [Hour]
Total WorkLoad [Hour]
Theoretical
14
3
42
Practicals/Labs
0
0
0
Self Study and Preparation
0
0
0
Homeworks, Performances
1
42
42
Projects
0
0
0
Field Studies
0
0
0
Midtermexams
1
26
26
Others
0
0
0
Final Exams
1
40
40
Total WorkLoad
150
Total workload/ 30 hr
5
ECTS Credit of the Course
5
26
CONTRIBUTION OF LEARNING OUTCOMES TO PROGRAMME QUALIFICATIONS
PQ1
PQ2
PQ3
PQ4
PQ5
PQ6
PQ7
PQ8
PQ9
PQ10
PQ11
PQ12
LO1
0
0
3
0
0
0
0
0
0
0
0
0
LO2
0
0
2
0
0
0
0
0
0
0
0
0
LO3
0
0
1
0
0
0
0
0
0
0
0
0
LO: Learning Objectives
PQ: Program Qualifications
Contribution Level:
1 Very Low
2 Low
3 Medium
4 High
5 Very High
