1	Course Title:	INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS
2	Course Code:	EEM4503
3	Type of Course:	Optional
4	Level of Course:	First Cycle
5	Year of Study:	4
6	Semester:	7
7	ECTS Credits Allocated:	4
8	Theoretical (hour/week):	3
9	Practice (hour/week) :	0
10	Laboratory (hour/week) :	0
11	Prerequisites:	None
12	Recommended optional programme components:	None
13	Language:	Turkish
14	Mode of Delivery:	Face to face
15	Course Coordinator:	Doç. Dr. ESİN KARPAT
16	Course Lecturers:	Yok
17	Contactinformation of the Course Coordinator:	Dr. Öğr. Üye. Esin KARPAT Mühendislik Fakültesi Elektrik-Elektronik Mühendisliği Bölümü Ofis:320 0.224.294 20 20
18	Website:
19	Objective of the Course:	The aim of the lectures is to give an overview of the Microelectromechanic systems world and the MEMS devices. It has been structured so to introduce the main features and properties of Microelectromechanical systems and their current and potential advantages which mainly derive from miniaturization and the evolution of the standard IC technological approach.
20	Contribution of the Course to Professional Development	They gain the knowledge about the material technology of the new age and the designs of micro-sized sensors, robots and devices of the future.

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Learning Outcomes:

1 To be able to gain an interdisciplinary overview of the current state of MEMS; 2 To be able to learn microfabrication methods; 3 To be able to learn different applications of MEMS;

22	Course Content:

Week	Theoretical	Practical
1	Introduction to MEMS.
2	History of Micro electromechanical systems
3	Applications of MEMS
4	Materials
5	Design Principles (Scaling)
6	Mems products
7	Microfabrication - Bulk
8	Microfabrication-Micro surface
9	Repeating courses
10	MEMS devices (Digital micromirrors, accelerometers, etc)
11	Microsensors (chemical, biological, mechanical, etc)
12	MEMS Actuators.
13	Future of MEMS
14	Future of MEMS

23	Textbooks, References and/or Other Materials:	An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf,Artech House Incorporated, 1999
24	Assesment

TERM LEARNING ACTIVITIES	NUMBER	PERCENT
Midterm Exam	1	40
Quiz	0	0
Homeworks, Performances	0	0
Final Exam	1	60
Total	2	100
Contribution of Term (Year) Learning Activities to Success Grade		40
Contribution of Final Exam to Success Grade		60
Total		100
Measurement and Evaluation Techniques Used in the Course	Measurement and evaluation is carried out according to the priciples of Bursa uludag University Associate and Undergraduate Education Regulation.
Information	The relative evoluation system is applied. 1 Midterm and 1 Final exams are held.

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ECTS / WORK LOAD TABLE

Activites	NUMBER	TIME [Hour]	Total WorkLoad [Hour]
Theoretical	14	3	42
Practicals/Labs	0	0	0
Self Study and Preparation	0	0	0
Homeworks, Performances	0	42	42
Projects	0	0	0
Field Studies	0	0	0
Midtermexams	1	2	2
Others	0	0	0
Final Exams	1	6	6
Total WorkLoad			120
Total workload/ 30 hr			4
ECTS Credit of the Course			4

26	CONTRIBUTION OF LEARNING OUTCOMES TO PROGRAMME QUALIFICATIONS
PQ1 PQ2 PQ3 PQ4 PQ5 PQ6 PQ7 PQ8 PQ9 PQ10 PQ11 PQ12 LO1 0 0 3 0 0 0 0 0 0 0 0 0 LO2 0 0 2 0 0 0 0 0 0 0 0 0 LO3 0 0 1 0 0 0 0 0 0 0 0 0

LO: Learning Objectives

PQ: Program Qualifications

Contribution Level:

1 Very Low

2 Low

3 Medium

4 High

5 Very High